Introduction
In partnership with Elemental Scientific Inc. (ESI), we’re delighted to bring to you a collection of application briefs for the fully-automated analysis of a variety of semiconductor-grade chemicals, seamlessly coupling the ESI prepFAST S ultraclean sample introduction system with PerkinElmer’s NexION® 5000 Multi-Quadrupole ICP-MS. The automated dilution and MSA calibration capabilities of the prepFAST S allow outstanding calibration linearity for all elements. And the NexION 5000 ICP-MS effectively eliminates spectral interferences in the samples, thanks to its multi-quadrupole technology and a true-quadrupole Universal Cell pressurized with pure reaction gases, resulting in superb background equivalent concentrations and detection limits, while demonstrating excellent tolerance to harsh chemicals such as these.
Automated Analysis of Semiconductor-Grade Hydrofluoric Acid with prepFAST S and NexION 5000 ICP-MS
This work presents the fully automated analysis of undiluted semiconductor-grade HF using PerkinElmer’s NexION 5000 ICP-MS working seamlessly with ESI’s prepFAST S ultraclean sample introduction system. The automated dilution and MSA calibration capabilities of the prepFAST S achieved outstanding linearity of the calibration curves for all 42 elements analyzed.
Automated Analysis of Semiconductor-Grade Sulfuric Acid with prepFAST S and NexION 5000 ICP-MS
This work presents the analysis of automatically diluted H2SO4 using PerkinElmer’s NexION 5000 Multi-Quadrupole ICP-MS working seamlessly with the ESI prepFAST S ultraclean sample introduction system. The automated dilution and MSA calibration capabilities of the prepFAST S allowed outstanding calibration linearity for all 52 elements.
Automated Analysis of Semiconductor-Grade TMAH with prepFAST S and NexION 5000 ICP-MS
This work presents the automated analysis of undiluted semiconductor-grade TMAH using PerkinElmer’s NexION 5000 Multi-Quadrupole ICP-MS working seamlessly with the ESI prepFAST S ultraclean sample introduction system. The automated MSA calibration capabilities of the prepFAST S allowed outstanding calibration linearity to be achieved for all 38 elements.
Automated Analysis of Semiconductor-Grade BOE with prepFAST S and NexION 5000 ICP-MS
This work presents the analysis of commercially available, undiluted BOE using PerkinElmer’s NexION® 5000 Multi-Quadrupole ICP-MS working seamlessly with ESI’s prepFAST S ultraclean sample introduction system. The automated MSA calibration capabilities of the prepFAST S delivered outstanding linearity of the calibration curves for all 50 elements analyzed.
Automated Analysis of Semiconductor-Grade Nitric Acid with prepFAST S and NexION 5000 ICP-MS
This work presents the fully automated analysis of undiluted semiconductor-grade HNO3 using PerkinElmer’s NexION® 5000 Multi-Quadrupole ICP-MS working seamlessly with the ESI prepFAST S ultraclean sample introduction system. The automated MSA calibration capabilities of the prepFAST S delivered outstanding linearity of the calibration curves for all 40 elements.