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Introduction

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In partnership with Elemental Scientific Inc. (ESI), we’re delighted to bring to you a collection of application briefs for the fully-automated analysis of a variety of semiconductor-grade chemicals, seamlessly coupling the ESI prepFAST S ultraclean sample introduction system with PerkinElmer’s NexION® 5000 Multi-Quadrupole ICP-MS. The automated dilution and MSA calibration capabilities of the prepFAST S allow outstanding calibration linearity for all elements. And the NexION 5000 ICP-MS effectively eliminates spectral interferences in the samples, thanks to its multi-quadrupole technology and a true-quadrupole Universal Cell pressurized with pure reaction gases, resulting in superb background equivalent concentrations and detection limits, while demonstrating excellent tolerance to harsh chemicals such as these.

 

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Automated Analysis of Semiconductor-Grade Hydrofluoric Acid with prepFAST S and NexION 5000 ICP-MS

This work presents the fully automated analysis of undiluted semiconductor-grade HF using PerkinElmer’s NexION 5000 ICP-MS working seamlessly with ESI’s prepFAST S ultraclean sample introduction system. The automated dilution and MSA calibration capabilities of the prepFAST S achieved outstanding linearity of the calibration curves for all 42 elements analyzed.

 

 

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Automated Analysis of Semiconductor-Grade Sulfuric Acid with prepFAST S and NexION 5000 ICP-MS

This work presents the analysis of automatically diluted H2SO4 using PerkinElmer’s NexION 5000 Multi-Quadrupole ICP-MS working seamlessly with the ESI prepFAST S ultraclean sample introduction system. The automated dilution and MSA calibration capabilities of the prepFAST S allowed outstanding calibration linearity for all 52 elements.

 

 

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Automated Analysis of Semiconductor-Grade TMAH with prepFAST S and NexION 5000 ICP-MS

This work presents the automated analysis of undiluted semiconductor-grade TMAH using PerkinElmer’s NexION 5000 Multi-Quadrupole ICP-MS working seamlessly with the ESI prepFAST S ultraclean sample introduction system. The automated MSA calibration capabilities of the prepFAST S allowed outstanding calibration linearity to be achieved for all 38 elements.

 

 

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Automated Analysis of Semiconductor-Grade BOE with prepFAST S and NexION 5000 ICP-MS

This work presents the analysis of commercially available, undiluted BOE using PerkinElmer’s NexION® 5000 Multi-Quadrupole ICP-MS working seamlessly with ESI’s prepFAST S ultraclean sample introduction system. The automated MSA calibration capabilities of the prepFAST S delivered outstanding linearity of the calibration curves for all 50 elements analyzed.

 

 

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Automated Analysis of Semiconductor-Grade Nitric Acid with prepFAST S and NexION 5000 ICP-MS

This work presents the fully automated analysis of undiluted semiconductor-grade HNO3 using PerkinElmer’s NexION® 5000 Multi-Quadrupole ICP-MS working seamlessly with the ESI prepFAST S ultraclean sample introduction system. The automated MSA calibration capabilities of the prepFAST S delivered outstanding linearity of the calibration curves for all 40 elements.