Introduction
In partnership with Elemental Scientific Inc. (ESI), we’re delighted to bring to you a collection of application briefs for the fully-automated analysis of a variety of semiconductor-grade chemicals, seamlessly coupling the ESI prepFAST S ultraclean sample introduction system with PerkinElmer’s NexION® 5000 Multi-Quadrupole ICP-MS. The automated dilution and MSA calibration capabilities of the prepFAST S allow outstanding calibration linearity for all elements. And the NexION 5000 ICP-MS effectively eliminates spectral interferences in the samples, thanks to its multi-quadrupole technology and a true-quadrupole Universal Cell pressurized with pure reaction gases, resulting in superb background equivalent concentrations and detection limits, while demonstrating excellent tolerance to harsh chemicals such as these.